Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers

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Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers

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ژورنال

عنوان ژورنال: Beilstein Journal of Nanotechnology

سال: 2016

ISSN: 2190-4286

DOI: 10.3762/bjnano.7.56